The quake hit just after midnight local time, nine miles southeast of Ica.
Sixteen homes were damaged in the quake. Officials say none of the 112 people injured suffered life-threatening injuries. Most were minor, and included heart palpitations as people fled their homes in panic.
The city of Ica was badly damaged in two prior earthquakes- a magnitude-8 earthquake in August 2007, as well as one last October.
The U.S. Geological Survey says Monday's quake was at a depth of 24 miles.
The Associated Press contributed to this story.