The United Airlines plane was approaching the gate at O'Hare at about 4:32 a.m. after arriving from San Diego when police said the male passenger pulled the emergency exit.
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He then walked onto the wing of Flight 2478 and then slid down onto the airfield, police said.
United said members of its crew stopped the passenger outside the plane, which taxied to an airport gate to let other passengers exit.
Chicago police officers then arrived on the scene and arrested him.
The 57-year-old Escondido, California, man, identified as Randy Davila, was charged with reckless conduct.
The Chicago Aviation Department said no injuries were reported.
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Airport operations were not impacted by the incident.
A United spokesperson issued the following statement:
"This morning United flight 2478 was taxiing toward the gate at Chicago O'Hare when a passenger opened an aircraft door and exited the plane. Our ground crew stopped the individual outside of the aircraft, and the person is now with law enforcement. The plane then arrived at the gate and all passengers deplaned safely. The safety of our customers and crew is our highest priority."
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The Associated Press contributed to this report.